Buchcover von Creation of photomasks by laser maskless lithography
Buchtitel:

Creation of photomasks by laser maskless lithography

Our Knowledge Publishing (01.06.2021 )

Books loader

Omni badge gutscheinfähig
ISBN-13:

978-620-3-66307-5

ISBN-10:
6203663077
EAN:
9786203663075
Buchsprache:
Englisch
Klappentext:
Photolithography occupies the main place in modern technology for the manufacture of microelectronic products. The technological process of photolithography consists of several basic operations: preparing the surface of a semiconductor wafer, applying a layer of photoresist to the surface of the wafer, drying the photoresist, exposing, developing and hardening the photoresist, controlling the geometric dimensions of the image, etching the film, washing the wafer after etching, removing the photoresist film from the surface, control of processed plates. The aim of the work was to obtain photomasks with the minimum parameters possible for this equipment. For this, the influence of the exposure time and the development time on the parameters of photomasks (the nature of the pattern) obtained by the method of maskless laser lithography on the exposure installation "Heidelberg µPG501" was investigated. As a result of the work, photomasks with geometric parameters of 2 μm were made, while the optimal exposure time of 35 ms and the development time of 60 s were set for this batch.
Verlag:
Our Knowledge Publishing
Webseite:
https://sciencia-scripts.com
von (Autor):
Elena Anatolyevna Shnyagina
Seitenanzahl:
68
Veröffentlicht am:
01.06.2021
Lagerbestand:
Lieferbar
Kategorie:
Sonstiges
Preis:
35,90 €
Stichworte:
Types of lithography, Photoresists and their properties, Positive FR, Negative photoresists, Photo masks, The main stages of the photolithography process, Preparing the substrate surface, Applying a photoresist layer, Drying the photoresist, exposure

Books loader

Adyen::diners Adyen::jcb Adyen::discover Adyen::amex Adyen::mc Adyen::visa Adyen::cup Adyen::unionpay Adyen::paypal Paypal Überweisung

  0 Produkte im Warenkorb
Warenkorb bearbeiten
Loading frontend
LOADING